Analysis of polysilicon critical dimension variation for submicron CMOS processes
Author(s)
Fitzgerald, Dawn Dougherty
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Advisor
Duane Boning, Charles Fine.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Includes bibliographical references (p. 139-140).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science