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dc.contributor.advisorJeffrey H. Lang, Martin A. Schmidt.en_US
dc.contributor.authorLiemke, Hans-Georgen_US
dc.date.accessioned2005-08-16T22:53:20Z
dc.date.available2005-08-16T22:53:20Z
dc.date.copyright1994en_US
dc.date.issued1994en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/12150
dc.descriptionThesis (B.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.en_US
dc.descriptionIncludes bibliographical references (leaf 52).en_US
dc.description.statementofresponsibilityby Hans-Georg Liemke.en_US
dc.format.extent52 leavesen_US
dc.format.extent2988832 bytes
dc.format.extent2988591 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectMechanical Engineeringen_US
dc.titleDesign and fabrication of a microelectromechanical relayen_US
dc.typeThesisen_US
dc.description.degreeB.S.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Mechanical Engineering
dc.identifier.oclc31977597en_US


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