Frequency-pulling effects in microfabricated resonant structures

Author(s)
Shirley, Timothy Earl
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Advisor
Stephen D. Senturia and James K. Roberge.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.
 
Includes bibliographical references (leaves 138-139).
 
Date issued
1993
URI
http://hdl.handle.net/1721.1/12344
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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