| dc.contributor.advisor | Henry I. Smith. | en_US |
| dc.contributor.author | Shah, Satyen N. (Satyen Navin) | en_US |
| dc.date.accessioned | 2005-08-15T23:37:01Z | |
| dc.date.available | 2005-08-15T23:37:01Z | |
| dc.date.copyright | 1993 | en_US |
| dc.date.issued | 1993 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/12436 | |
| dc.description | Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993. | en_US |
| dc.description | Includes bibliographical references (leaf 27). | en_US |
| dc.description.statementofresponsibility | by Satyen N. Shah. | en_US |
| dc.format.extent | 27 leaves | en_US |
| dc.format.extent | 1507131 bytes | |
| dc.format.extent | 1506892 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | A white light interferometer for improved achromatic holographic lithography | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | B.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 29737097 | en_US |
