Simulation and analysis of rarefied gas flows in chemical vapor deposition processes
Author(s)
Coronell, Daniel G
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Advisor
Klavis F. Jensen.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993. Includes bibliographical references (leaves 288-300).
Date issued
1993Department
Massachusetts Institute of Technology. Department of Chemical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering