Combined experimental and modelling studies of laser assisted chemical vapor deposition of copper and aluminum

Author(s)
Han, Jaesung
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Advisor
Klavs F. Jensen.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993.
 
Includes bibliographical references (leaves 192-203).
 
Date issued
1993
URI
http://hdl.handle.net/1721.1/12494
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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