Infrared vertically-illuminated photodiode for chip alignment feedback

Author(s)
Alloatti, Luca; Ram, Rajeev J
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Creative Commons Attribution 4.0 International license https://creativecommons.org/licenses/by/4.0/
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Abstract
We report on vertically-illuminated photodiodes fabricated in the GlobalFoundries 45nm 12SOI node and on a packaging concept for optically-interconnected chips. The photodiodes are responsive at 1180 nm -a wavelength currently used in chip-to-chip communications. They have further a wide field-of-view which enables chip-to-board positional feedback in chip-board assemblies. Monolithic integration enables on-chip processing of the positional data.
Date issued
2016-08
URI
https://hdl.handle.net/1721.1/124958
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Research Laboratory of Electronics
Journal
Methods
Publisher
AIP Publishing
Citation
Alloatti, L., and R. J. Ram. “Infrared Vertically-Illuminated Photodiode for Chip Alignment Feedback.” AIP Advances 6, 8 (August 2016): 085219. © 2016 the Authors
Version: Final published version
ISSN
1095-9130
1046-2023
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