Infrared vertically-illuminated photodiode for chip alignment feedback
Author(s)Alloatti, Luca; Ram, Rajeev J
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We report on vertically-illuminated photodiodes fabricated in the GlobalFoundries 45nm 12SOI node and on a packaging concept for optically-interconnected chips. The photodiodes are responsive at 1180 nm -a wavelength currently used in chip-to-chip communications. They have further a wide field-of-view which enables chip-to-board positional feedback in chip-board assemblies. Monolithic integration enables on-chip processing of the positional data.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Research Laboratory of Electronics
Alloatti, L., and R. J. Ram. “Infrared Vertically-Illuminated Photodiode for Chip Alignment Feedback.” AIP Advances 6, 8 (August 2016): 085219. © 2016 the Authors
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