Self-aligned InGaAs FinFETs with 5-nm fin-width and 5-nm gate-contact separation
Author(s)
Vardi, Alon; Kong, Lisa (Lisa Fanzhen); Lu, Wenjie; Cai, Xiaowei; Zhao, Xin; Grajal de la Fuente, Jesus; del Alamo, Jesus A; ... Show more Show less
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We demonstrate self-aligned InGaAs FinFETs with fin widths down to 5 nm fabricated through a CMOS compatible front-end process. Precision dry etching of the recess cap results in metal contacts that are about 5 nm away from the intrinsic portion of the fin. The new process has allowed us to fabricate devices with undoped fins and compare them with delta-doped fins. We find that in highly scaled transistors, undoped fin devices show better OFF-state and a tighter VT distribution but similar ON-state characteristics, as compared with δ-doped-fin transistors. 2D Poisson-Schrodinger simulations reveal undoped fins making more effective use of the fin height.
Date issued
2018-01Department
Massachusetts Institute of Technology. Microsystems Technology Laboratories; Massachusetts Institute of Technology. Department of Electrical Engineering and Computer ScienceJournal
IEEE International Electron Devices Meeting (IEDM)
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Vardi, Alon et al. "Self-aligned InGaAs FinFETs with 5-nm fin-width and 5-nm gate-contact separation." IEEE International Electron Devices Meeting (IEDM), December 2017, San Francisco, CA, USA, Institute of Electrical and Electronics Engineers, January 2018 © 2017 IEEE
Version: Author's final manuscript
ISBN
9781538635599