Refining the process of achromatic holographic lithography
Author(s)
Olster, Daniel B
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Advisor
Henry I. Smith.
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Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992. Includes bibliographical references (leaf 31).
Date issued
1992Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science