Chip-Scale quantum magnetometry via CMOS integration with diamond color centers

Abstract

There has been increasing interest in spin-based quantum systems for a wide range of applications. In particular, the nitrogen-vacancy (NV) center in diamond has demonstrated outstanding sensing and imaging capabilities. However, previous control apparatuses of these quantum systems have used discrete instrumentation to both manipulate and detect the NV's spin state. This limits potential applications. In this thesis the first chip-scale Complementary Metal Oxide Semiconductor (CMOS) platform that integrates the necessary components for NV quantum state preparation, control, and measurement is presented. A CMOS integrated system capable of the control and readout of an ensemble of NV centers in diamond for magnetic field sensing is demonstrated. Scalar magnetic field sensing with a layer of nanodiamond particles achieving 74 [mu]T/[square root]Hz sensitivity is presented. In addition, vector magnetic field sensing with a slab of single crystalline diamond with enhanced sensitivity of 32.1 [mu]T/[square root]Hz is also presented. Techniques for strong generation and efficient delivery of microwave for quantum-state control, and optical filtering/detection of spin-dependent fluorescence for quantum-state readout are introduced. This hybrid architecture is a significant step towards a highly integrated quantum system with applications in life sciences, tracking, and advanced metrology.