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dc.contributor.advisorStephen D. Senturia.en_US
dc.contributor.authorPan, Jeffrey Yenen_US
dc.date.accessioned2005-08-15T15:59:27Z
dc.date.available2005-08-15T15:59:27Z
dc.date.copyright1991en_US
dc.date.issued1992en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/13075
dc.descriptionThesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992.en_US
dc.descriptionIncludes bibliographical references (leaves 109-116).en_US
dc.description.statementofresponsibilityby Jeffrey Yen Pan.en_US
dc.format.extent144 leavesen_US
dc.format.extent12276008 bytes
dc.format.extent12275766 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectElectrical Engineering and Computer Scienceen_US
dc.titleA study of suspended-membrane and acoustic techniques for the determination of the mechanical properties of thin polymer filmsen_US
dc.typeThesisen_US
dc.description.degreePh.D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
dc.identifier.oclc26329628en_US


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