Reactive chemisorption of molecular fluorine on Si(100)

Author(s)
McGonigal, Marianne.
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Massachusetts Institute of Technology. Department of Chemistry.
Advisor
Sylvia T. Ceyer.
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Description
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1989
 
Includes bibliographical references (leaves 215-217).
 
Date issued
1989
URI
https://hdl.handle.net/1721.1/130998
Department
Massachusetts Institute of Technology. Department of Chemistry
Publisher
Massachusetts Institute of Technology
Keywords
Chemistry.
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