| dc.contributor.advisor | Emanuel Sachs. | en_US |
| dc.contributor.author | Guo, Ruey-Shan | en_US |
| dc.date.accessioned | 2005-09-21T22:33:13Z | |
| dc.date.available | 2005-09-21T22:33:13Z | |
| dc.date.copyright | 1991 | en_US |
| dc.date.issued | 1991 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/13459 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1991. | en_US |
| dc.description | Includes bibliographical references (leaves 105-109). | en_US |
| dc.description.statementofresponsibility | by Ruey-Shan Guo. | en_US |
| dc.format.extent | 150 leaves | en_US |
| dc.format.extent | 9290610 bytes | |
| dc.format.extent | 9290365 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Mechanical Engineering | en_US |
| dc.title | Modeling, optimization, and control of spatial uniformity in manufacturing processes | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 25693441 | en_US |
