Device structures for microelectronic gas sensors.
Author(s)
Wishneusky, John Andrew
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Advisor
Stephen D. Senturia.
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Massachusetts Institute of Technology. Dept. of Electrical Engineering. Thesis. 1974. Elec.E. MICROFICHE COPY ALSO AVAILABLE IN BARKER ENGINEERING LIBRARY. Includes bibliographical footnotes.
Date issued
1974Department
Massachusetts Institute of Technology. Department of Electrical Engineering; Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering