Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector
Author(s)Su, P; Han, Z; Kita, D; Becla, P; Lin, H; Deckoff-Jones, S; Richardson, K; Kimerling, LC; Hu, J; Agarwal, A; ... Show more Show less
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© 2019 Author(s). We demonstrate a monolithic waveguide sensor integrated with a detector on-chip for mid-infrared absorption spectroscopic sensing. The optical sensing element comprises a chalcogenide glass spiral waveguide, and the detector is a PbTe photoconductor integrated directly with the chalcogenide waveguide. The limit of detection of the sensor for methane gas was experimentally assessed to be 1% by volume. Further optimization of the fabrication process and normalization of the laser power fluctuations should result in a maximum sensitivity of 330 ppmv.
Applied Physics Letters