Effect of microstructure of aluminum alloys on the electromigration-limited reliability of VLSI interconnects

Author(s)
Cho, Jaeshin
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Advisor
Carl V. Thompson.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990.
 
Includes bibliographical references (leaves 210-222).
 
Date issued
1990
URI
http://hdl.handle.net/1721.1/13636
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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