Mechanism of ion beam induced deposition

Author(s)
Dubner, Andrew D. (Andrew David)
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Advisor
Carl V. Thompson and John Melngailis.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990.
 
Includes bibliographical references (leaves 174-177).
 
Date issued
1990
URI
http://hdl.handle.net/1721.1/13637
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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