The reaction of molecular fluorine with silicon(100) : adsorption, desorption, and scattering dynamics

Author(s)
Schulberg, Michelle Tobi.
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Description
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1990
 
Includes bibliographical references.
 
Date issued
1990
URI
https://hdl.handle.net/1721.1/138564
Department
Massachusetts Institute of Technology. Department of Chemistry
Publisher
Massachusetts Institute of Technology
Keywords
Chemistry
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