Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry
Author(s)
Jiang, Bo; Meng, Kai; Youcef-Toumi, Kamal
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Ellipsometry is an important metrology tool in a plethora of industries. The measurement accuracy can be significantly affected by the existence of Poisson-Gaussian mixed noise. This paper quantifies the induced error on normalized Mueller matrix measurements through statistical analysis. A method is then proposed to mitigate the effects of Poisson-Gaussian noise in spectroscopic ellipsometry signal demodulation, based on maximum likelihood estimation. The noise is characterized through experiments on an in-house setup. The improved performance of dimension reconstruction from the proposed method is demonstrated through simulations.
Date issued
2021-08Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringJournal
Optics Express
Publisher
Optical Society of America
Citation
Jiang, Bo, Meng, Kai and Youcef-Toumi, Kamal. 2021. "Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry." Optics Express, 29 (17).
Version: Final published version
ISSN
1094-4087