| dc.contributor.advisor | Stephen D. Senturia. | en_US |
| dc.contributor.author | Maseeh, Fariborz | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Dept. of Civil Engineering. | en_US |
| dc.date.accessioned | 2005-08-10T19:34:11Z | |
| dc.date.available | 2005-08-10T19:34:11Z | |
| dc.date.copyright | 1990 | en_US |
| dc.date.issued | 1990 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/14081 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil Engineering, 1990. | en_US |
| dc.description | Includes bibliographical references (leaves 172-181). | en_US |
| dc.description.statementofresponsibility | by Fariborz Maseeh-Tehrani. | en_US |
| dc.format.extent | 196 leaves | en_US |
| dc.format.extent | 9418967 bytes | |
| dc.format.extent | 9418722 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Civil Engineering. | en_US |
| dc.title | Characterization of mechanical properties of microelectronic thin films | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Civil Engineering | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Civil and Environmental Engineering | |
| dc.identifier.oclc | 23613820 | en_US |
