Self-consistent continuum modeling of radio-frequency glow discharges

Author(s)
Gogolides, Evangelos
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Massachusetts Institute of Technology. Dept. of Chemical Engineering.
Advisor
Herbert H. Sawin.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1990.
 
Includes bibliographical references (leaves 274-287).
 
Date issued
1990
URI
http://hdl.handle.net/1721.1/14284
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering.
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