Sol-gel derived tantalum oxide thin films

Author(s)
Silverman, Lee Arnold, 1959-
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Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Advisor
Donald R. Uhlmann.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1987.
 
Vita.
 
Bibliography: leaves 183-185.
 
Date issued
1987
URI
http://hdl.handle.net/1721.1/14835
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering.
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