The effect of low energy ion bombardment on the crystallographic orientation of thin films

Author(s)
Yu, Lock See
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Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Advisor
L. Rafael Reif.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1985.
 
MICROFICHE COPY AVAILABLE IN ARCHIVES AND SCIENCE.
 
Includes bibliographical references.
 
Date issued
1985
URI
http://hdl.handle.net/1721.1/15310
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering.
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