MEMS Simulations and Waveguide Loss Analysis forPhotonic Integrated Circuits

Abstract

Microelectromechanical systems (MEMS) are promising candidates to be used in photonic integrated chips (PICs) for applications. While there are a variety of MEMS devices used for different purposes, the main concern of this thesis will be the using MEMS as phase shifters and understanding waveguide losses. MEMS devices can be actuated by applying a potential difference, and can be used to adjust the phase shift of light travelling through the waveguides. The shift is observed as a result of the change of the physical distance between the cantilever and the fixed waveguides buried on the surface of the chips. Due to their ease of activation, ability to precisely control the phase shift, and small heat footprint, these devices are excellent candidates for cryogenic applications, such as quantum computers. In this work, we present a summary of the literature regarding the MEMS devices, and investigate their working principles. We introduce a simple theoretical model for understanding the two biggest source factors in characterization of MEMS devices: bending and propagation losses. We then present the experimental setup through used for performing loss measurements on a fabricated chip. We look at simulation results for understanding the behavior of the cantilever, perform loss analysis on measurements, and conclude with potential issues to be resolved for the devices to work as intended in the future.