Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography
Name
50181446-MIT.pdf
Description
Full printable version
Size
1.57 MB
Format
Adobe PDF
Checksum (MD5)
39f0da56de63d0853dae49f71c9a824a
Author(s)
Finlayson, Mark Alan, 1977-
Advisor(s)
Henry I. Smith.
Date Issued
2001
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
Includes bibliographical references (p. 59-61).
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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