Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography

Author(s)
Finlayson, Mark Alan, 1977-
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Henry I. Smith.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
 
Includes bibliographical references (p. 59-61).
 
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
 
Date issued
2001
URI
http://hdl.handle.net/1721.1/16793
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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