A six-degree of freedom flexural positioning stage

Abstract

A novel, low-cost positioning stage was constructed using a six-axis compliant mechanism driven by three two-axis electromagnetic actuators. The mechanism's monolithic, planar geometry is easily fabricated with low-cost manufacturing processes (such as waterjet machining). The manipulator tolerates ±1 mm actuator misalignment with less than 0.1% full-scale position error. Measurements over a 100x100x100 nm3 work volume displayed resolution better than the sensing capability, 5nm, and open-loop linearity errors less than 0.005% of the full-scale range (100 [mu]m). Measurements over a 100x100x100 [mu]m3 work volume exhibited linearity errors less than 0.20% full-scale. The mechanism's equilateral symmetry and planar geometry restricted thermal drift rates at start-up to 23nm and 4 [mu]tradians over 30 minutes and 0.1°C temperature change. The manipulator, built for $ 2000 (excluding electronics), was successfully tested in a fiber optic alignment application.