The development of a prototype Zone-Plate-Array Lithography (ZPAL) system

Author(s)
Patel, Amil Ashok, 1979-
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Henry I. Smith.
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Abstract
The research presented in this paper aims to build a Zone-Plate-Array Lithography (ZPAL) prototype tool that will demonstrate the high-resolution, parallel patterning capabilities of the architecture. The experiment will require the integration of micromechanical spatial light modulators with an existing zone-plate-array testbed lithography tool. The system development requires an efficient data-delivery system to promote throughput and a thoughtful optical channel to optimize the lithographic performance of zone-plates. Lithography results obtained from the prototype will be presented along with basic performance characteristics.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.
 
Includes bibliographical references (p. 75-77).
 
Date issued
2004
URI
http://hdl.handle.net/1721.1/18054
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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