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dc.contributor.advisorAlexander H. Slocum.en_US
dc.contributor.authorSihler, Joachim, 1971-en_US
dc.contributor.otherMassachusetts Institute of Technology. Dept. of Mechanical Engineering.en_US
dc.date.accessioned2005-09-06T21:46:01Z
dc.date.available2005-09-06T21:46:01Z
dc.date.copyright2004en_US
dc.date.issued2004en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/27105
dc.descriptionThesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2004.en_US
dc.descriptionIncludes bibliographical references (leaves 127-136).en_US
dc.description.abstractThis thesis presents an electrostatically actuated silicon microvalve designed for use in a miniature gas chromatography system for sample preparation and injection. In contrast to prior art, this design combines an integrated low voltage electrostatic microactuator as well as tight sealing capability. The device uses only silicon and silicon dioxide, which allows it to be used in a gas chromatography system for a wide range of chemically compatible gases. Using a 3-way design, the valve can switch an input gas flow to either of two output ports, which helps reducing wafer space consumption if used in a valve array, by combining two 2-way on/off valves into one device. After a thorough discussion of prior art in microvalve technology, the design and modeling of the microvalve is presented. A detailed discussion of the microfabrication issues is given, along with a final process plan. One-sided prototype valves were fabricated and their performance was characterized. Leakage rates on the order of 10⁻⁶ atm-cc/sec have been measured. The prototype valves are capable of switching inlet pressures of typically 8 psi with open flow rates of 8 sccm Nitrogen at an operation voltage of 23 V.en_US
dc.description.statementofresponsibilityby Joachim Sihler.en_US
dc.format.extent137 leavesen_US
dc.format.extent8776763 bytes
dc.format.extent8793945 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectMechanical Engineering.en_US
dc.titleA low-leakage 3-way silicon microvalveen_US
dc.typeThesisen_US
dc.description.degreePh.D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Dept. of Mechanical Engineering.en_US
dc.identifier.oclc56835933en_US


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