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dc.contributor.advisorMartin L. Culpepper.en_US
dc.contributor.authorMangudi Varadarajan, Kartik, 1981-en_US
dc.contributor.otherMassachusetts Institute of Technology. Dept. of Mechanical Engineering.en_US
dc.date.accessioned2008-02-28T16:09:56Z
dc.date.available2008-02-28T16:09:56Z
dc.date.copyright2005en_US
dc.date.issued2005en_US
dc.identifier.urihttp://dspace.mit.edu/handle/1721.1/27878en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/27878
dc.descriptionThesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005.en_US
dc.descriptionIncludes bibliographical references (p. 140-142).en_US
dc.description.abstractThis thesis presents the design, modeling, fabrication and experimental validation of an active precision fixturing system called the Hybrid Positioning Fixture (HPF). The HPF uses the principles of exact constraint, combined with principles and means of Nanomanipulation to fixture components with tens of nanometer accuracy and repeatability. Achieving this level of performance requires addressing three fundamental limitations of precision fixtures; (1) Elimination of stiction via integrated compliance, (2) Integration of sensors and actuators to enable correction of systematic and time variable alignment errors, and (3) Improvement of fixture contacts' stability and longevity via hard coatings. Conceptual and analytic models are developed for the integration of compliant elements, sensors and actuators within the fixture. The validity of these concepts/models is tested via a prototype HPF. Analytic models and design rules are provided to guide designers in the use of thin coatings for precision fixture contacts. These are based upon non-linear finite element analysis. The effects of hard and soft interlayer, which reduce coating stresses and improve coating adherence, are also analyzed. The performance of the HPF is measured in two modes, passive (constant voltage supplied to piezoelectric actuators) and active (actuators supplied with different input voltages). The HPF is shown to be capable of 3 [sigma], passive repeatability of 100nm in x, y, and repeatability of 2 [mu] radian in [theta]x, [theta]y and [theta]z. Active tests indicate that the HPF is capable of accuracy of better than 5nm.en_US
dc.description.abstract(cont.) The fixture is shown to have a load capacity of 450 N and stiffness of 7N/[mu]m. The combination of nanometer-level accuracy, repeatability and high load capacity make the HPF suitable for a range of current and emerging applications such as photonics packaging, mask to wafer alignment, nanomanufacturing, nano-scale research experiments and automated transfer lines.en_US
dc.description.statementofresponsibilityby Kartik Mangudi Varadarajan.en_US
dc.format.extent172 p.en_US
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/27878en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectMechanical Engineering.en_US
dc.titleDesign of ultra precision fixtures for nano-manufacturingen_US
dc.typeThesisen_US
dc.description.degreeS.M.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Dept. of Mechanical Engineering.en_US
dc.identifier.oclc61050470en_US


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