| dc.contributor.advisor | Lionel C. Kimerling. | en_US |
| dc.contributor.author | Morrison, Troy | en_US |
| dc.date.accessioned | 2005-09-26T18:13:21Z | |
| dc.date.available | 2005-09-26T18:13:21Z | |
| dc.date.copyright | 1994 | en_US |
| dc.date.issued | 1994 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/28051 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. | en_US |
| dc.description | Includes bibliographical references (p. 95-97). | en_US |
| dc.description.statementofresponsibility | by Troy Morrison. | en_US |
| dc.format.extent | 97 p. | en_US |
| dc.format.extent | 3352771 bytes | |
| dc.format.extent | 3364072 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en_US | |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Materials Science and Engineering | en_US |
| dc.title | Particle characterization for an eight inch wafer tungsten chemical vapor deposition system | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Materials Science and Engineering | |
| dc.identifier.oclc | 30950827 | en_US |
