| dc.contributor.advisor | Herbert H. Sawin. | en_US |
| dc.contributor.author | Liu, Joanne | en_US |
| dc.date.accessioned | 2006-02-02T18:41:44Z | |
| dc.date.available | 2006-02-02T18:41:44Z | |
| dc.date.copyright | 1993 | en_US |
| dc.date.issued | 1993 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/31038 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993. | en_US |
| dc.description | Includes bibliographical references (p. 207-213). | en_US |
| dc.description.statementofresponsibility | by Joanne Liu. | en_US |
| dc.format.extent | 495 p. | en_US |
| dc.format.extent | 19590818 bytes | |
| dc.format.extent | 19660224 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Chemical Engineering | en_US |
| dc.title | Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Chemical Engineering | |
| dc.identifier.oclc | 28153004 | en_US |
