Design of a high quality factor spiral inductors in RF MCM-D
Name
62325823-MIT.pdf
Description
Full printable version
Size
1.04 MB
Format
Adobe PDF
Checksum (MD5)
3b247822710481e7819b37988c59934e
Author(s)
Peters, Joshua, 1981-
Advisor(s)
Luca Daniel and Thomas Marinis.
Date Issued
2004
Publisher
Massachusetts Institute of Technology
Abstract
This thesis studies the design and fabrication of spiral inductors for use in Radio Frequency (RF) applications. A design methodology is developed to search an inductor design space efficiently using existing simulation software. The methodology allows designers to specify a desired inductance, total area, and frequency of operation instead of the geometrical parameters required by most design software. An implementation of the methodology that finds devices with optimal quality factor at a given frequency is presented. Several inductor designs are generated using this implementation, and the devices are fabricated in the Draper Laboratory, Inc. Multichip Module-Deposited (MCM-D) process. Simulated characteristics of the devices are verified using experimental measurements, and deviations from predicted performance are discussed.
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Includes bibliographical references (p. 79-82).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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