Critical gas-phase and surface reactions involved in the chemical vapor desposition of diamond films

Author(s)
Wolden, Colin Andrew
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Advisor
Karen K. Gleason.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.
 
Includes bibliographical references.
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/32158
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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