Benchmarking semiconductor lithography equipment development & sourcing practices among leading-edge U.S. manufacturers

Author(s)
Pieczulewski, Charles N. (Charles Nicholas)
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Advisor
Charles H. Fine.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
 
Includes bibliographical references.
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/32171
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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