Laser-assisted focused-ion-beam-induced deposition of copper
Author(s)
Funatsu, Jun
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Advisor
Carl V. Thompson, II.
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Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. Includes bibliographical references (leaves 73-74).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering