Browsing MIT OCW Archived Courses by Subject "vacuum"

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    • 6.152J / 3.155J Microelectronics Processing Technology, Fall 2003 

      Schmidt, Martin A.; O'Handley, Robert C., 1942-; Ruff, Susan (2003-12)
      Introduces the theory and technology of integrated-circuit fabrication. Lectures and laboratory sessions on basic processing techniques such as diffusion, oxidation, epitaxy, photolithography, chemical vapor deposition, ...