Process development for a silicon planar resonant-tunneling field-effect transistor
Author(s)
Chou, Mike Chuan, 1969-
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Advisor
Henry I. Smith, Dimitri A. Antoniadis.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Includes bibliographical references (p. 67-69).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science