| dc.contributor.advisor | Stephen D. Senturia. | en_US |
| dc.contributor.author | Young, Joseph Y.-J., 1968- | en_US |
| dc.date.accessioned | 2006-11-06T16:10:49Z | |
| dc.date.available | 2006-11-06T16:10:49Z | |
| dc.date.copyright | 1998 | en_US |
| dc.date.issued | 1998 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/34334 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. | en_US |
| dc.description | Includes bibliographical references (p. 67-70). | en_US |
| dc.description.statementofresponsibility | by Joseph Y.-J. Young. | en_US |
| dc.format.extent | 96 p. | en_US |
| dc.format.extent | 14929423 bytes | |
| dc.format.extent | 14929215 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | Squeeze-film damping for MEMS structures | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 39134663 | en_US |
