Low temperature deposition of metal carbide films from single source precursors
Author(s)
Rubiano, Rodrigo R. (Rubiano Ray)![Thumbnail](/bitstream/handle/1721.1/34692/30998238-MIT.pdf.jpg?sequence=5&isAllowed=y)
DownloadFull printable version (2.805Mb)
Advisor
Uday, B. Pal.
Terms of use
Metadata
Show full item recordDescription
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Nuclear Engineering, 1994, and Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science & Engineering, 1994. Includes bibliographical references (leaves 71-73).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Nuclear Engineering; Massachusetts Institute of Technology. Department of Materials Science and Engineering; Massachusetts Institute of Technology. Department of Nuclear Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Nuclear Engineering, Materials Science and Engineering