Low temperature deposition of metal carbide films from single source precursors

Author(s)
Rubiano, Rodrigo R. (Rubiano Ray)
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Advisor
Uday, B. Pal.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Nuclear Engineering, 1994, and Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science & Engineering, 1994.
 
Includes bibliographical references (leaves 71-73).
 
Date issued
1994
URI
http://hdl.handle.net/1721.1/34692
Department
Massachusetts Institute of Technology. Department of Nuclear Engineering; Massachusetts Institute of Technology. Department of Materials Science and Engineering; Massachusetts Institute of Technology. Department of Nuclear Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Nuclear Engineering, Materials Science and Engineering
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