Modeling of micro-electro-mechanical integrated test structures
Name
33343495-MIT.pdf
Description
Full printable version
Size
1.34 MB
Format
Adobe PDF
Checksum (MD5)
941e7517b15f2ccd3e13d1fe271d55c9
Author(s)
Wu, SunMan Patrick
Advisor(s)
Stephen D. Senturia.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (leaf 38).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Persistent DSpace Link
