Epitaxial silicon growth rate control

Author(s)
Yeboah-Amankwah, Safroadu Kwadwo
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Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
 
Title as it appears in the June 1994 MIT Graduate List: Real time growth rate control of epitaxial silicon.
 
Includes bibliographical references (leaves 65-66).
 
Date issued
1994
URI
http://hdl.handle.net/1721.1/36449
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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