Browsing Singapore-MIT Alliance (SMA) by Author "Wang, Lianshan"
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Evolution of AlN buffer layers on Silicon and the effect on the property of the expitaxial GaN film
Zang, Keyan; Wang, Lianshan; Chua, Soo-Jin; Thompson, Carl V. (2003-01)The morphology evolution of high-temperature grown AlN nucleation layers on (111) silicon has been studied using atomic force microscopy (AFM). The structure and morphology of subsequently grown GaN film were characterized ... -
Structural analysis of metalorganic chemical vapor deposited AlN nucleation layers on Si (111)
Zang, Keyan; Wang, Lianshan; Chua, Soo-Jin; Thompson, Carl V. (2004-01)AlN nucleation layers are being investigated for growth of GaN on Si. The microstructures of high-temperature AlN nucleation layers grown by MOCVD on Si (111) substrates with trimethylaluminium pre-treatments have been ...