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    • Process Variability in Micro-Embossing 

      Hardt, David E.; Ganesan, Bala; Dirckx, Matthew; Shoji, Grant; Thaker, Kunal; e.a. (2005-01)
      A promising technique for the large-scale manufacture of micro-fluidic devices and photonic devices is hot embossing of polymers such as PMMA. Micro-embossing is a deformation process where the workpiece material is heated ...