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    • Micro Raman Spectroscopy of Annealed Erbium Implanted GaN 

      Vajpeyi, Agam P.; Chua, Soo-Jin; Fitzgerald, Eugene A.; Tripathy, S. (2004-01)
      Wurtzite GaN epilayers grown by metal organic chemical vapor deposition on sapphire substrates were subsequently ion implanted with Er to a dose of 5×10¹⁵ cm⁻². The implanted samples were annealed in nitrogen atmosphere ...