Browsing Singapore-MIT Alliance (SMA) by Subject "imaging"

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    • Imaging at the Nano-scale: State of the Art and Advanced Techniques 

      Aumond, Bernardo D.; El Rifai, Osamah M.; Youcef-Toumi, Kamal (2003-01)
      Surface characteristics such as topography and critical dimensions serve as important indicators of product quality and manufacturing process performance especially at the micrometer and the nanometer scales. This paper ...