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TEM Study on the Evolution of Ge Nanocrystals in Si Oxide Matrix as a Function of Ge Concentration and the Si Reduction Process

Chew, Han Guan; Choi, Wee Kiong; Foo, Y.L.; Chim, Wai Kin; Fitzgerald, Eugene A.; e.a. (2006-01)

Growth and evolution of germanium (Ge) nanocrystals embedded into a silicon oxide (SiO₂) system have been studied based on the Ge content of co-sputtered Ge-SiO₂ films using transmission electron microscopy (TEM) and X-ray ...