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    • Progress in Developing and Extending RM³ Heterogeneous Integration Technologies 

      Fonstad, Clifton G. Jr.; Atmaca, Eralp; Giziewicz, Wojciech; Perkins, James; Rumpler, Joseph (2003-01)
      This paper describes recent progress in a continuing program to develop and apply RM³ (recess mounting with monolithic metallization) technologies for heterogeneous integration. Particular emphasis is placed on the APB ...