Browsing Advanced Materials for Micro- and Nano-Systems (AMMNS) by Subject "Raman spectroscopy"
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Micro Raman Spectroscopy of Annealed Erbium Implanted GaN
(2004-01)Wurtzite GaN epilayers grown by metal organic chemical vapor deposition on sapphire substrates were subsequently ion implanted with Er to a dose of 5×10¹⁵ cm⁻². The implanted samples were annealed in nitrogen atmosphere ...