Now showing items 1-6 of 6

    • High hole and electron mobilities using Strained Si/Strained Ge heterostructures 

      Gupta, Saurabh; Lee, Minjoo L.; Leitz, Christopher W.; Fitzgerald, Eugene A. (2004-01)
      PMOS and NMOS mobility characteristics of the dual channel (strained Si/strained Ge) heterostructure have been reviewed. It is shown that the dual channel heterostructure can provide substantially enhanced mobilities for ...
    • MOSFET Channel Engineering using Strained Si, SiGe, and Ge Channels 

      Fitzgerald, Eugene A.; Lee, Minjoo L.; Leitz, Christopher W.; Antoniadis, Dimitri A. (2003-01)
      Biaxial tensile strained Si grown on SiGe virtual substrates will be incorporated into future generations of CMOS technology due to the lack of performance increase with scaling. Compressively strained Ge-rich alloys with ...
    • Si Industry at a Crossroads: New Materials or New Factories? 

      Fitzgerald, Eugene A.; Leitz, Christopher W.; Lee, Minjoo L.; Antoniadis, Dimitri A.; Currie, Matthew T. (2002-01)
      Many trends in the silicon industry could be interpreted as the herald of the end of traditional Si scaling. If this premise holds, future performance and system-on-chip applications may not be reached with conventional ...
    • SiGe-On-Insulator (SGOI) Technology and MOSFET Fabrication 

      Cheng, Zhiyuan; Fitzgerald, Eugene A.; Antoniadis, Dimitri A. (2002-01)
      In this work, we have developed two different fabrication processes for relaxed Si₁₋xGex-on-insulator (SGOI) substrates: (1) SGOI fabrication by etch-back approach, and (2) by "smart-cut" approach utilizing ...
    • SiGe-On-Insulator (SGOI): Two Structures for CMOS Application 

      Cheng, Zhiyuan; Jung, Jongwan; Lee, Minjoo L.; Nayfeh, Hasan; Pitera, Arthur J.; e.a. (2003-01)
      Two SiGe-on-insulator (SGOI) structures for CMOS application are presented: surface-channel strained-Si on SGOI (SSOI) and dual-channel SGOI structures. Comparisons between two structures are made from both device performance ...
    • Strained Ge channel p-type metal-oxide-semiconductor field-effect transistors grown on Si₁₋xGex/Si virtual substrates 

      Lee, Minjoo L.; Leitz, Christopher W.; Cheng, Zhiyuan; Antoniadis, Dimitri A.; Fitzgerald, Eugene A. (2002-01)
      We have fabricated strained Ge channel p-type metal-oxide-semiconductor field-effect transistors (p-MOSFETs) on Si₀.₃Ge₀.₇ virtual substrates. The poor interface between silicon dioxide (SiO₂) and the Ge channel ...