Browsing Advanced Materials for Micro- and Nano-Systems (AMMNS) by Subject "electron-beam lithography"

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    • Two-dimensional Photonic Crystals Fabricated by Nanoimprint Lithography 

      Chen, A.; Chua, Soo-Jin; Fonstad, Clifton G. Jr.; Wang, B.; Wilhelmi, O. (2005-01)
      We report on the process parameters of nanoimprint lithography (NIL) for the fabrication of two-dimensional (2-D) photonic crystals. The nickel mould with 2-D photonic crystal patterns covering the area up to 20mm² is ...